Heidelberg Instruments

About the company: Heidelberg Instruments is a world leader in the development and production of high precision photolithography systems, maskless aligners and nanofabrication tools. Our systems are installed in industrial and academic facilities all over the world. These are used for direct writing and photomask production in various areas of MEMS/NEMS – for Semiconductors, Quantum Computing, Flat Panel Displays, Photonics, 2D Materials, IOT and many other related applications. With over 35 years of experience and more than 1,000 systems installed worldwide, we can provide lithography solutions specifically tailored to meet all your micro- and nanofabrication requirements – no matter how challenging.

Website: www.heidelberg-instruments.com

Supporting information:

Key dates

Abstract submission deadline:

17 April 2022 [EXTENDED]

Early registration deadline:

26 May 2022 (EXTENDED)

Registration deadline:

9 June 2022 (EXTENDED)


You can see a list of our sponsors here.

Supported by the following IOP groups:

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